JPH0466400U - - Google Patents
Info
- Publication number
- JPH0466400U JPH0466400U JP11006290U JP11006290U JPH0466400U JP H0466400 U JPH0466400 U JP H0466400U JP 11006290 U JP11006290 U JP 11006290U JP 11006290 U JP11006290 U JP 11006290U JP H0466400 U JPH0466400 U JP H0466400U
- Authority
- JP
- Japan
- Prior art keywords
- cold trap
- trap chamber
- diffusion pump
- oil diffusion
- liquid nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11006290U JPH0466400U (en]) | 1990-10-19 | 1990-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11006290U JPH0466400U (en]) | 1990-10-19 | 1990-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0466400U true JPH0466400U (en]) | 1992-06-11 |
Family
ID=31857343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11006290U Pending JPH0466400U (en]) | 1990-10-19 | 1990-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0466400U (en]) |
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1990
- 1990-10-19 JP JP11006290U patent/JPH0466400U/ja active Pending